{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9607841","patent":{"patent_number":"US-9607841","title":"Semiconductor device and method of fabricating the same","assignee":null,"inventors":[],"filing_date":"2014-10-09T00:00:00.000Z","publication_date":"2017-03-28T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":15,"abstract":"Provided is a semiconductor device and a method of fabricating the same. The method may include forming trenches in a substrate and lower gate patterns on the substrate between the trenches, forming sacrificial patterns filling the trenches, forming a porous insulating layer on the lower gate patterns to cover top surfaces of the sacrificial patterns, removing the sacrificial patterns through pores of the porous insulating layer to form air gaps surrounded by the trenches and the porous insulating layer, and forming a liner insulating layer on inner surfaces of the trenches through the pores of the porous insulating layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Semiconductor device and method of fabricating the same","description":"Provided is a semiconductor device and a method of fabricating the same. The method may include forming trenches in a substrate and lower gate patterns on the substrate between the trenches, forming s","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9607841","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9607841","citation_suggestion":"Patentable. \"Semiconductor device and method of fabricating the same\" (US-9607841). https://patentable.app/patents/US-9607841","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9607841","json":"https://patentable.app/api/llm-context/US-9607841","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T13:15:48.459Z"}