{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9608550","patent":{"patent_number":"US-9608550","title":"Lightup prevention using multi-layer ceramic fabrication techniques","assignee":null,"inventors":[],"filing_date":"2015-05-29T00:00:00.000Z","publication_date":"2017-03-28T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":18,"abstract":"In accordance with this disclosure, there are provided several inventions, including an electrostatic chuck apparatus comprising multiple layers with cutouts that form a labyrinth structure which defined a path for cooling or heating gas. The structure prevents particles from accelerating such that they form unwanted lightup in the gas flow path."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Lightup prevention using multi-layer ceramic fabrication techniques","description":"In accordance with this disclosure, there are provided several inventions, including an electrostatic chuck apparatus comprising multiple layers with cutouts that form a labyrinth structure which defi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9608550","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9608550","citation_suggestion":"Patentable. \"Lightup prevention using multi-layer ceramic fabrication techniques\" (US-9608550). https://patentable.app/patents/US-9608550","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9608550","json":"https://patentable.app/api/llm-context/US-9608550","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:37:34.755Z"}