{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9612020","patent":{"patent_number":"US-9612020","title":"High efficiency high accuracy heater driver","assignee":null,"inventors":[],"filing_date":"2013-08-29T00:00:00.000Z","publication_date":"2017-04-04T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":9,"abstract":"A thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"High efficiency high accuracy heater driver","description":"A thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The thermal process chamber includes a plurality of halogen lamps, the lamp driver, a ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9612020","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9612020","citation_suggestion":"Patentable. \"High efficiency high accuracy heater driver\" (US-9612020). https://patentable.app/patents/US-9612020","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9612020","json":"https://patentable.app/api/llm-context/US-9612020","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:23:40.159Z"}