{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9612193","patent":{"patent_number":"US-9612193","title":"Ellipsometry system","assignee":null,"inventors":[],"filing_date":"2012-07-09T00:00:00.000Z","publication_date":"2017-04-04T00:00:00.000Z","cpc_codes":["G01N","A61B","G01N"],"num_claims":6,"abstract":"An ellipsometry system and a detection unit thereof are capable of achieving miniaturization and price reduction associated therewith. The ellipsometry system includes the detection unit that: has an optical polarization element; separates an interference polarization beam obtained by causing the object-reflected polarization beam and reference reflected polarization beam to interfere with each other into a plurality of interference polarization beams on a wavelength basis; and detects the respective separated polarization components in each wavelength. The optical polarization element: has a birefringence characteristic including a first refractive index and a second refractive index; receives the separated interference polarization beams of the respective wavelengths in a wavelength order and in a parallel manner; separates the separated interference polarization beam of each wavelength, on a polarization component basis, while transmitting the same, and outputs the respective separated polarization components in each wavelength in the same direction but along different optical axes."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Ellipsometry system","description":"An ellipsometry system and a detection unit thereof are capable of achieving miniaturization and price reduction associated therewith. The ellipsometry system includes the detection unit that: has an ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9612193","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9612193","citation_suggestion":"Patentable. \"Ellipsometry system\" (US-9612193). https://patentable.app/patents/US-9612193","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9612193","json":"https://patentable.app/api/llm-context/US-9612193","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:27:03.607Z"}