{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9614038","patent":{"patent_number":"US-9614038","title":"Nanowire device and method of manufacturing the same","assignee":null,"inventors":[],"filing_date":"2014-09-24T00:00:00.000Z","publication_date":"2017-04-04T00:00:00.000Z","cpc_codes":["B82Y","B82Y","H01L","H01L","H01L","H01L","H01L"],"num_claims":11,"abstract":"A method of manufacturing a nanowire device is disclosed. The method includes providing a substrate, wherein the substrate comprises a pair of support pads, a recess disposed between the support pads, a second insulating layer disposed on the support pads, a third insulating layer disposed on a bottom of the recess, and at least one nanowire suspended between the support pads at a top portion of the recess; forming a first insulating layer on the nanowire; depositing a dummy gate material over the substrate on the first insulating layer, and patterning the dummy gate material to form a dummy gate structure surrounding a channel region; forming a first oxide layer on laterally opposite sidewalls of the dummy gate; and extending the nanowire on laterally opposite ends of the channel region to the respective support pads, so as to form a source region and a drain region."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Nanowire device and method of manufacturing the same","description":"A method of manufacturing a nanowire device is disclosed. The method includes providing a substrate, wherein the substrate comprises a pair of support pads, a recess disposed between the support pads,","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9614038","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9614038","citation_suggestion":"Patentable. \"Nanowire device and method of manufacturing the same\" (US-9614038). https://patentable.app/patents/US-9614038","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9614038","json":"https://patentable.app/api/llm-context/US-9614038","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:34:31.506Z"}