{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9616451","patent":{"patent_number":"US-9616451","title":"Apparatus for processing wafer-shaped articles","assignee":null,"inventors":[],"filing_date":"2012-11-19T00:00:00.000Z","publication_date":"2017-04-11T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":14,"abstract":"The harmful effects of accumulating droplets of process liquid on the outer surface of a dispense nozzle are prevented by equipping an apparatus for process wafer-shaped articles with a blow-off block that blows the droplets off the nozzle outer surface before they can coalesce and drop in an uncontrolled manner onto the work piece. The nozzle preferably has a polished and tapered outer surface to aid in blowing off any accumulated droplets of process liquid from the outer surface."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus for processing wafer-shaped articles","description":"The harmful effects of accumulating droplets of process liquid on the outer surface of a dispense nozzle are prevented by equipping an apparatus for process wafer-shaped articles with a blow-off block","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9616451","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9616451","citation_suggestion":"Patentable. \"Apparatus for processing wafer-shaped articles\" (US-9616451). https://patentable.app/patents/US-9616451","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9616451","json":"https://patentable.app/api/llm-context/US-9616451","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:37:51.623Z"}