{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9617653","patent":{"patent_number":"US-9617653","title":"Apparatus and method for fast evaluation of electroplating formulation performance in microvia filling","assignee":null,"inventors":[],"filing_date":"2013-12-12T00:00:00.000Z","publication_date":"2017-04-11T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":20,"abstract":"The presently claimed invention provides an electrochemical analytical apparatus and a method for evaluating performance of electroplating formulations of electrolyte solutions used for via filling. The electrochemical analytical apparatus comprises an electric power generating device, an electrical output signal measurement device, an electrochemical measurement device, and a motion generator. The electrochemical measurement device of the present invention comprises a supporting structure, a cavity, a cavity electrode, and a surface electrode. The electrical output signals of the cavity electrode and the surface electrode are measured during electroplating for calculating a filling performance value. The presently claimed invention provides an accurate, fast and cost effective method for evaluating performance of electroplating formulations, following with choosing the electroplating formulation of the highest FP value for actual microvia filling process."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus and method for fast evaluation of electroplating formulation performance in microvia filling","description":"The presently claimed invention provides an electrochemical analytical apparatus and a method for evaluating performance of electroplating formulations of electrolyte solutions used for via filling. T","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9617653","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9617653","citation_suggestion":"Patentable. \"Apparatus and method for fast evaluation of electroplating formulation performance in microvia filling\" (US-9617653). https://patentable.app/patents/US-9617653","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9617653","json":"https://patentable.app/api/llm-context/US-9617653","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T15:05:24.673Z"}