{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9618448","patent":{"patent_number":"US-9618448","title":"Grazing order metrology","assignee":null,"inventors":[],"filing_date":"2015-05-07T00:00:00.000Z","publication_date":"2017-04-11T00:00:00.000Z","cpc_codes":["G01N","G06F","G01N"],"num_claims":17,"abstract":"Metrology targets, optical systems and methods are provided, which enable metrology measurements of very small features, using resonance of illuminated radiation within periodical structures of the target, under appropriate illumination. Metrology targets comprise periodical structure(s) configured to resonate incident radiation and having a pitch defined by the grating equation with respect to configured parameters such as the selected diffraction order, refractive indices and the illumination's wavelength(s) and incidence angles. Possibly, the target may further comprise substructure(s) which are optically coupled with the resonating incident radiation in the periodical structure(s). The spatial organization of the periodic structures and the substructures, as well as the optical organization of illuminated and scattered radiation provide collecting phase signals from the targets at a range of parameters, such as different wavelengths, spatial angles and polarizations to enhance the metrology signal and achieve a very high sensitivity to very small target features."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Grazing order metrology","description":"Metrology targets, optical systems and methods are provided, which enable metrology measurements of very small features, using resonance of illuminated radiation within periodical structures of the ta","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9618448","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9618448","citation_suggestion":"Patentable. \"Grazing order metrology\" (US-9618448). https://patentable.app/patents/US-9618448","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9618448","json":"https://patentable.app/api/llm-context/US-9618448","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:15:42.411Z"}