{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9618493","patent":{"patent_number":"US-9618493","title":"Substrate processing apparatus and method for detecting an abnormality of an ozone gas concentration","assignee":null,"inventors":[],"filing_date":"2014-12-10T00:00:00.000Z","publication_date":"2017-04-11T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":6,"abstract":"A substrate processing apparatus is provided that includes an ozonizer for generating ozone gas and an ozone sensor for detecting an ozone gas concentration. The substrate processing apparatus processes a substrate by using the ozone gas supplied from the ozonizer. The substrate processing apparatus includes a monitor unit for monitoring the ozone gas concentration detected by the ozone sensor and a control unit for detecting an abnormality of the ozone gas concentration based on the monitored ozone gas concentration and the monitored discharge power."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing apparatus and method for detecting an abnormality of an ozone gas concentration","description":"A substrate processing apparatus is provided that includes an ozonizer for generating ozone gas and an ozone sensor for detecting an ozone gas concentration. The substrate processing apparatus process","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9618493","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9618493","citation_suggestion":"Patentable. \"Substrate processing apparatus and method for detecting an abnormality of an ozone gas concentration\" (US-9618493). https://patentable.app/patents/US-9618493","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9618493","json":"https://patentable.app/api/llm-context/US-9618493","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:33:00.900Z"}