{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9619876","patent":{"patent_number":"US-9619876","title":"Detecting defects on wafers based on 2D scatter plots of values determined for output generated using different optics modes","assignee":null,"inventors":[],"filing_date":"2013-03-12T00:00:00.000Z","publication_date":"2017-04-11T00:00:00.000Z","cpc_codes":["G06T","G01N","G01N","G01N","G01N","G01N","G06T","G06T","G01N","G06T","G06T","G06T"],"num_claims":27,"abstract":"Methods and systems for detecting defects on a wafer are provided. One method includes determining difference values for pixels in first output for a wafer generated using a first optics mode of an inspection system and determining other values for pixels in second output for the wafer generated using a second optics mode of the inspection system. The first and second optics modes are different from each other. The method also includes generating a two-dimensional scatter plot of the difference values and the other values for the pixels in the first and second output corresponding to substantially the same locations on the wafer. The method further includes detecting defects on the wafer based on the two-dimensional scatter plot."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Detecting defects on wafers based on 2D scatter plots of values determined for output generated using different optics modes","description":"Methods and systems for detecting defects on a wafer are provided. One method includes determining difference values for pixels in first output for a wafer generated using a first optics mode of an in","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9619876","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9619876","citation_suggestion":"Patentable. \"Detecting defects on wafers based on 2D scatter plots of values determined for output generated using different optics modes\" (US-9619876). https://patentable.app/patents/US-9619876","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9619876","json":"https://patentable.app/api/llm-context/US-9619876","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:39:37.458Z"}