{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9620384","patent":{"patent_number":"US-9620384","title":"Control of O-ingress into gate stack dielectric layer using oxygen permeable layer","assignee":null,"inventors":[],"filing_date":"2014-07-03T00:00:00.000Z","publication_date":"2017-04-11T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":10,"abstract":"A method of manufacturing a semiconductor structure, by depositing a dielectric layer is a dummy gate, or an existing gate structure, prior to the formation of gate spacers. Following the formation of spacers, and in some embodiments replacing a dummy gate with a final gate structure, oxygen is introduced to a gate dielectric through a diffusion process, using the deposited dielectric layer as a diffusion pathway."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Control of O-ingress into gate stack dielectric layer using oxygen permeable layer","description":"A method of manufacturing a semiconductor structure, by depositing a dielectric layer is a dummy gate, or an existing gate structure, prior to the formation of gate spacers. Following the formation of","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9620384","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9620384","citation_suggestion":"Patentable. \"Control of O-ingress into gate stack dielectric layer using oxygen permeable layer\" (US-9620384). https://patentable.app/patents/US-9620384","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9620384","json":"https://patentable.app/api/llm-context/US-9620384","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T04:08:16.330Z"}