{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9620589","patent":{"patent_number":"US-9620589","title":"Integrated circuits and methods of fabrication thereof","assignee":null,"inventors":[],"filing_date":"2014-04-07T00:00:00.000Z","publication_date":"2017-04-11T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":2,"abstract":"Integrated circuits and methods for fabricating integrated circuits are provided. In an embodiment, a method includes providing a semiconductor substrate, defining a length on the semiconductor substrate corresponding to opposing vertices of a nanowire, removing a portion of the semiconductor substrate to provide a first fin structure and a second fin structure, etching a first cavity proximate to the first side, depositing a protective layer in the first cavity, removing a portion of the protective layer to expose a portion of the semiconductor substrate, and etching a second cavity at the exposed semiconductor substrate where the first and second cavities communicate. The first and second fin structures are adjacent where the length of the first fin structure corresponds to the opposing vertices and has a first side and a second side."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Integrated circuits and methods of fabrication thereof","description":"Integrated circuits and methods for fabricating integrated circuits are provided. In an embodiment, a method includes providing a semiconductor substrate, defining a length on the semiconductor substr","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9620589","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9620589","citation_suggestion":"Patentable. \"Integrated circuits and methods of fabrication thereof\" (US-9620589). https://patentable.app/patents/US-9620589","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9620589","json":"https://patentable.app/api/llm-context/US-9620589","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:47:50.737Z"}