{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9624099","patent":{"patent_number":"US-9624099","title":"Planar cavity MEMS and related structures, methods of manufacture and design structures","assignee":null,"inventors":[],"filing_date":"2015-12-11T00:00:00.000Z","publication_date":"2017-04-18T00:00:00.000Z","cpc_codes":["G06F","G06F","H01L"],"num_claims":6,"abstract":"A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Planar cavity MEMS and related structures, methods of manufacture and design structures","description":"A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper ele","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9624099","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9624099","citation_suggestion":"Patentable. \"Planar cavity MEMS and related structures, methods of manufacture and design structures\" (US-9624099). https://patentable.app/patents/US-9624099","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9624099","json":"https://patentable.app/api/llm-context/US-9624099","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T03:56:24.407Z"}