{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9625398","patent":{"patent_number":"US-9625398","title":"Cross sectional depth composition generation utilizing scanning electron microscopy","assignee":null,"inventors":[],"filing_date":"2016-01-11T00:00:00.000Z","publication_date":"2017-04-18T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G01N","G01N"],"num_claims":6,"abstract":"A method for generating cross-sectional profiles using a scanning electron microscope (SEM) includes scanning a sample with an electron beam to gather an energy-dispersive X-ray spectroscopy (EDS) spectrum for an energy level to determine element composition across an area of interest. A mesh is generated to locate positions where a depth profile will be taken. EDS spectra are gathered for energy levels at mesh locations. A number of layers of the sample are determined by distinguishing differences in chemical composition between depths as beam energies are stepped through. A depth profile is generated for the area of interest by compiling the number of layers and the element composition across the mesh."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Cross sectional depth composition generation utilizing scanning electron microscopy","description":"A method for generating cross-sectional profiles using a scanning electron microscope (SEM) includes scanning a sample with an electron beam to gather an energy-dispersive X-ray spectroscopy (EDS) spe","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9625398","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9625398","citation_suggestion":"Patentable. \"Cross sectional depth composition generation utilizing scanning electron microscopy\" (US-9625398). https://patentable.app/patents/US-9625398","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9625398","json":"https://patentable.app/api/llm-context/US-9625398","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T13:17:48.761Z"}