{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9625834","patent":{"patent_number":"US-9625834","title":"Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method","assignee":null,"inventors":[],"filing_date":"2016-07-22T00:00:00.000Z","publication_date":"2017-04-18T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":41,"abstract":"A substrate is exposed with an illumination light via a projection optical system. A stage that holds the substrate is moved over a base disposed below the projection optical system. An encoder system measures positional information of the stage with a plurality of heads that face a grating section. Movement of the stage is controlled based on the positional information measured with the encoder system, while compensating for a measurement error of the encoder system that occurs due to a head of the plurality of heads. During movement of the stage, one head of the plurality of heads is switched to another head different from the plurality of heads. Correction information for controlling movement of the stage using the another head after the switching is acquired based on the positional information measured with the plurality of heads used before the switching."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method","description":"A substrate is exposed with an illumination light via a projection optical system. A stage that holds the substrate is moved over a base disposed below the projection optical system. An encoder system","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9625834","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9625834","citation_suggestion":"Patentable. \"Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method\" (US-9625834). https://patentable.app/patents/US-9625834","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9625834","json":"https://patentable.app/api/llm-context/US-9625834","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:13:58.844Z"}