{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9627173","patent":{"patent_number":"US-9627173","title":"Stage device and charged particle beam apparatus using the stage device","assignee":null,"inventors":[],"filing_date":"2015-02-19T00:00:00.000Z","publication_date":"2017-04-18T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":22,"abstract":"To attain the above object, in the present invention, proposed are a stage apparatus including a sample stage that mounts a sample, a first position detection device that detects a position of the sample stage, a second position detection device that detects a position of the sample stage when the sample stage is positioned in a part of a stage movement range that the first position detection device is capable of detecting, and a control device that adjusts an offset amount of the first position detection device on the basis of a position detection result obtained by the second position detection device, and a charged particle beam apparatus using the stage apparatus."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Stage device and charged particle beam apparatus using the stage device","description":"To attain the above object, in the present invention, proposed are a stage apparatus including a sample stage that mounts a sample, a first position detection device that detects a position of the sam","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9627173","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9627173","citation_suggestion":"Patentable. \"Stage device and charged particle beam apparatus using the stage device\" (US-9627173). https://patentable.app/patents/US-9627173","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9627173","json":"https://patentable.app/api/llm-context/US-9627173","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:22:57.580Z"}