{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9627219","patent":{"patent_number":"US-9627219","title":"CMP wafer edge control of dielectric","assignee":null,"inventors":[],"filing_date":"2014-04-16T00:00:00.000Z","publication_date":"2017-04-18T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":21,"abstract":"Methods of forming a semiconductor device are presented. The method includes providing a wafer with top and bottom wafer surfaces. The wafer includes edge and non-edge regions. A dielectric layer having a desired concave top surface is provided on the top wafer surface. The method includes planarizing the dielectric layer to form a planar top surface of the dielectric layer. The desired concave top surface of the dielectric layer thicknesses compensates for different planarizing rates at the edge and non-edge regions of the wafer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"CMP wafer edge control of dielectric","description":"Methods of forming a semiconductor device are presented. The method includes providing a wafer with top and bottom wafer surfaces. The wafer includes edge and non-edge regions. A dielectric layer havi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9627219","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9627219","citation_suggestion":"Patentable. \"CMP wafer edge control of dielectric\" (US-9627219). https://patentable.app/patents/US-9627219","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9627219","json":"https://patentable.app/api/llm-context/US-9627219","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:21:55.228Z"}