{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9627237","patent":{"patent_number":"US-9627237","title":"Apparatus, method and non-transitory storage medium for accommodating and processing a substrate","assignee":null,"inventors":[],"filing_date":"2014-01-07T00:00:00.000Z","publication_date":"2017-04-18T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":10,"abstract":"A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attaching/detaching mechanism. The lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions. The mechanism is also provided with a lid abnormality detecting sensor, a lid attaching/detaching mechanism closing sensor, a lid attaching/detaching mechanism opening sensor, a pressure sensor and a control part."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus, method and non-transitory storage medium for accommodating and processing a substrate","description":"A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attachin","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9627237","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9627237","citation_suggestion":"Patentable. \"Apparatus, method and non-transitory storage medium for accommodating and processing a substrate\" (US-9627237). https://patentable.app/patents/US-9627237","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9627237","json":"https://patentable.app/api/llm-context/US-9627237","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:14:57.633Z"}