{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9631297","patent":{"patent_number":"US-9631297","title":"Method of producing epitaxial silicon wafer and epitaxial silicon wafer","assignee":null,"inventors":[],"filing_date":"2013-07-24T00:00:00.000Z","publication_date":"2017-04-25T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":7,"abstract":"Provided is a method of producing an epitaxial silicon wafer which has high flatness at the peripheral portion and an epitaxial silicon wafer obtained by the method. In the method of producing an epitaxial silicon wafer, an epitaxial layer is formed on the top surface of a silicon wafer with a chamfered end having a width of 200 μm or less, which surface has a surface orientation of the (100) plane or the (110) plane."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of producing epitaxial silicon wafer and epitaxial silicon wafer","description":"Provided is a method of producing an epitaxial silicon wafer which has high flatness at the peripheral portion and an epitaxial silicon wafer obtained by the method. In the method of producing an epit","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9631297","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9631297","citation_suggestion":"Patentable. \"Method of producing epitaxial silicon wafer and epitaxial silicon wafer\" (US-9631297). https://patentable.app/patents/US-9631297","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9631297","json":"https://patentable.app/api/llm-context/US-9631297","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:23:01.581Z"}