{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9632043","patent":{"patent_number":"US-9632043","title":"Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF","assignee":null,"inventors":[],"filing_date":"2015-05-11T00:00:00.000Z","publication_date":"2017-04-25T00:00:00.000Z","cpc_codes":["G01N","G01N","H01L"],"num_claims":20,"abstract":"A method for X-ray Fluorescence (XRF) analysis includes directing an X-ray beam onto a sample and measuring an XRF signal excited from the sample, in a reference measurement in which the sample includes one or more first layers formed on a substrate, and in a target measurement after one or more second layers are formed on the substrate in addition to the first layers, so as to produce a reference XRF spectrum and a target XRF spectrum, respectively. A contribution of the first layers to the target XRF spectrum is reduced using the reference XRF spectrum. A parameter of at least one of the second layers is estimated using the target XRF spectrum in which the contribution of the first layers has been reduced."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF","description":"A method for X-ray Fluorescence (XRF) analysis includes directing an X-ray beam onto a sample and measuring an XRF signal excited from the sample, in a reference measurement in which the sample includ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9632043","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9632043","citation_suggestion":"Patentable. \"Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF\" (US-9632043). https://patentable.app/patents/US-9632043","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9632043","json":"https://patentable.app/api/llm-context/US-9632043","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T16:53:04.454Z"}