{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9632366","patent":{"patent_number":"US-9632366","title":"Mask and method of manufacturing photoresist spacers with the mask","assignee":null,"inventors":[],"filing_date":"2014-09-18T00:00:00.000Z","publication_date":"2017-04-25T00:00:00.000Z","cpc_codes":["G02F","G02F","G02F"],"num_claims":20,"abstract":"A mask and a method of manufacturing photoresist spacers with the mask are provided. The method includes: using the mask to expose and develop to a coated negative resist material, so as to form at least one sub photoresist spacer with at least one predetermined height, wherein an area of the shading portion of the first penetration region is determined according to the predetermined height of the sub photoresist spacer. Using the mask and the method of manufacturing photoresist spacers with the mask, different heights of the sub photoresist spacers can be obtained."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Mask and method of manufacturing photoresist spacers with the mask","description":"A mask and a method of manufacturing photoresist spacers with the mask are provided. The method includes: using the mask to expose and develop to a coated negative resist material, so as to form at le","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9632366","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9632366","citation_suggestion":"Patentable. \"Mask and method of manufacturing photoresist spacers with the mask\" (US-9632366). https://patentable.app/patents/US-9632366","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9632366","json":"https://patentable.app/api/llm-context/US-9632366","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:45:36.844Z"}