{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9633834","patent":{"patent_number":"US-9633834","title":"Photolithographic method for forming a coating layer","assignee":null,"inventors":[],"filing_date":"2015-03-17T00:00:00.000Z","publication_date":"2017-04-25T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":20,"abstract":"A method for forming a coating layer includes spraying coating material having a first flowability onto a substrate; performing a first spin coating process with a first spin speed to form an initial coating layer; and performing a first baking process to the initial coating layer to form a first material layer having a second flowability and a second material layer having a third flowability. The third flowability is less than the first flowability but larger than the second flowability, which is less than the first flowability. Further, the method includes performing a second spin coating process with a second spin speed to drive the coating material in the second material layer flowing on the surface of the first material layer to form a third material layer with a uniform thickness, and performing a second baking process to form a final coating layer on the substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Photolithographic method for forming a coating layer","description":"A method for forming a coating layer includes spraying coating material having a first flowability onto a substrate; performing a first spin coating process with a first spin speed to form an initial ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9633834","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9633834","citation_suggestion":"Patentable. \"Photolithographic method for forming a coating layer\" (US-9633834). https://patentable.app/patents/US-9633834","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9633834","json":"https://patentable.app/api/llm-context/US-9633834","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:36:32.108Z"}