{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9633897","patent":{"patent_number":"US-9633897","title":"Air-gap forming techniques for interconnect structures","assignee":null,"inventors":[],"filing_date":"2016-06-01T00:00:00.000Z","publication_date":"2017-04-25T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"The present disclosure relates to a method of forming an interconnect structure. In some embodiments, the method is performed by forming a trench within a first dielectric layer and forming sacrificial spacers along sidewalls of the trench. The trench is filled with a conductive material, and the sacrificial spacers are removed after the trench has been filled with the conductive material. A second dielectric layer is formed over the first dielectric layer to leave an air-gap in a region from which the sacrificial spacers were removed."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Air-gap forming techniques for interconnect structures","description":"The present disclosure relates to a method of forming an interconnect structure. In some embodiments, the method is performed by forming a trench within a first dielectric layer and forming sacrificia","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9633897","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9633897","citation_suggestion":"Patentable. \"Air-gap forming techniques for interconnect structures\" (US-9633897). https://patentable.app/patents/US-9633897","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9633897","json":"https://patentable.app/api/llm-context/US-9633897","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:18:14.526Z"}