{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9633958","patent":{"patent_number":"US-9633958","title":"Bonding pad surface damage reduction in a formation of digital pattern generator","assignee":null,"inventors":[],"filing_date":"2015-01-30T00:00:00.000Z","publication_date":"2017-04-25T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"A method of fabricating a Digital pattern generator (DPG) device is disclosed. The method includes forming an etch-stop-layer (ESL) over a bonding pad in a first region over a substrate, forming a pixel well in the second region over the substrate, forming an anti-charging layer over the bonding pad and along sidewalls of the pixel well. The bonding pad is covered by the ESL during the forming of the anti-charging layer over the bonding pad. The method also includes removing the anti-charging layer over the bonding pad. Therefore, after removing the anti-charging layer over the bonding pad, the bonding pad remains covered by the ESL."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Bonding pad surface damage reduction in a formation of digital pattern generator","description":"A method of fabricating a Digital pattern generator (DPG) device is disclosed. The method includes forming an etch-stop-layer (ESL) over a bonding pad in a first region over a substrate, forming a pix","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9633958","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9633958","citation_suggestion":"Patentable. \"Bonding pad surface damage reduction in a formation of digital pattern generator\" (US-9633958). https://patentable.app/patents/US-9633958","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9633958","json":"https://patentable.app/api/llm-context/US-9633958","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:19:13.684Z"}