{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9639097","patent":{"patent_number":"US-9639097","title":"Component temperature control by coolant flow control and heater duty cycle control","assignee":null,"inventors":[],"filing_date":"2014-09-25T00:00:00.000Z","publication_date":"2017-05-02T00:00:00.000Z","cpc_codes":["G05D","G05B","H01L"],"num_claims":15,"abstract":"Methods and systems for controlling temperatures in plasma processing chamber for a wide range of setpoint temperatures and reduced energy consumption. Temperature control is coordinated between a coolant liquid loop and a heat source by a control algorithm implemented by the plasma processing module controller. The control algorithm may completely stop the flow of coolant liquid to a temperature-controlled component in response to a feedback signal indicating an actual temperature is below the setpoint temperature. The control algorithm may further be based at least in part on a feedforward control signal derived from a plasma power or change in plasma power input into the processing chamber during process recipe execution."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Component temperature control by coolant flow control and heater duty cycle control","description":"Methods and systems for controlling temperatures in plasma processing chamber for a wide range of setpoint temperatures and reduced energy consumption. Temperature control is coordinated between a coo","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9639097","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9639097","citation_suggestion":"Patentable. \"Component temperature control by coolant flow control and heater duty cycle control\" (US-9639097). https://patentable.app/patents/US-9639097","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9639097","json":"https://patentable.app/api/llm-context/US-9639097","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:45:48.120Z"}