{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9640449","patent":{"patent_number":"US-9640449","title":"Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy","assignee":null,"inventors":[],"filing_date":"2015-04-16T00:00:00.000Z","publication_date":"2017-05-02T00:00:00.000Z","cpc_codes":["H01L","G01N","G01N","G01N","H01L","G01N","G01N"],"num_claims":21,"abstract":"Photoreflectance spectroscopy is used to measure strain at or near the edge of a wafer in a production process. The strain measurement is used to anticipate defects and make prospective corrections in later stages of the production process. Strain measurements are used to associate various production steps with defects to enhance later production processes."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy","description":"Photoreflectance spectroscopy is used to measure strain at or near the edge of a wafer in a production process. The strain measurement is used to anticipate defects and make prospective corrections in","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9640449","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9640449","citation_suggestion":"Patentable. \"Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy\" (US-9640449). https://patentable.app/patents/US-9640449","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9640449","json":"https://patentable.app/api/llm-context/US-9640449","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:49:06.854Z"}