{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9641949","patent":{"patent_number":"US-9641949","title":"MEMS device and method for manufacturing the MEMS device","assignee":null,"inventors":[],"filing_date":"2014-06-30T00:00:00.000Z","publication_date":"2017-05-02T00:00:00.000Z","cpc_codes":["H04R","H04R","H04R","H04R"],"num_claims":18,"abstract":"A MEMS device and a method for manufacturing a MEMS device are disclosed. In an embodiment the MEMS device comprises a support having a cavity therethrough and a membrane extended over the cavity of the support, wherein the membrane is at least partially reinforced by graphene."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"MEMS device and method for manufacturing the MEMS device","description":"A MEMS device and a method for manufacturing a MEMS device are disclosed. In an embodiment the MEMS device comprises a support having a cavity therethrough and a membrane extended over the cavity of t","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9641949","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9641949","citation_suggestion":"Patentable. \"MEMS device and method for manufacturing the MEMS device\" (US-9641949). https://patentable.app/patents/US-9641949","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9641949","json":"https://patentable.app/api/llm-context/US-9641949","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:04:51.328Z"}