{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9645079","patent":{"patent_number":"US-9645079","title":"Structured illumination for contrast enhancement in overlay metrology","assignee":null,"inventors":[],"filing_date":"2015-07-08T00:00:00.000Z","publication_date":"2017-05-09T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":28,"abstract":"Contrast enhancement in a metrology tool may include generating a beam of illumination, directing a portion of the generated beam onto a surface of a spatial light modulator (SLM), directing at least a portion of the generated beam incident on the surface of the SLM through an aperture of an aperture stop and onto one or more target structures of one or more samples, and generating a selected illumination pupil function of the illumination transmitted through the aperture utilizing the SLM in order to establish a contrast level of one or more field images of the one or more target structures above a selected contrast threshold, and performing one or more metrology measurements on the one or more target structures utilizing the selected illumination pupil function."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Structured illumination for contrast enhancement in overlay metrology","description":"Contrast enhancement in a metrology tool may include generating a beam of illumination, directing a portion of the generated beam onto a surface of a spatial light modulator (SLM), directing at least ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9645079","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9645079","citation_suggestion":"Patentable. \"Structured illumination for contrast enhancement in overlay metrology\" (US-9645079). https://patentable.app/patents/US-9645079","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9645079","json":"https://patentable.app/api/llm-context/US-9645079","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:20:00.063Z"}