{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9645093","patent":{"patent_number":"US-9645093","title":"System and method for apodization in a semiconductor device inspection system","assignee":null,"inventors":[],"filing_date":"2015-11-02T00:00:00.000Z","publication_date":"2017-05-09T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N"],"num_claims":46,"abstract":"An inspection system with selectable apodization includes a selectably configurable apodization device disposed along an optical pathway of an optical system. The apodization device includes one or more apodization elements operatively coupled to one or more actuation stages. The one or more actuation stages are configured to selectably actuate the one or more apodization elements along one or more directions. The inspection system includes a control system communicatively coupled to the one or more actuation stages. The control system is configured to selectably control an actuation state of at the one or more apodization elements so as to apply a selected apodization profile formed with the one or more apodization elements."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"System and method for apodization in a semiconductor device inspection system","description":"An inspection system with selectable apodization includes a selectably configurable apodization device disposed along an optical pathway of an optical system. The apodization device includes one or mo","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9645093","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9645093","citation_suggestion":"Patentable. \"System and method for apodization in a semiconductor device inspection system\" (US-9645093). https://patentable.app/patents/US-9645093","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9645093","json":"https://patentable.app/api/llm-context/US-9645093","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:23:19.949Z"}