{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9645502","patent":{"patent_number":"US-9645502","title":"Lithographic apparatus, programmable patterning device and lithographic method","assignee":null,"inventors":[],"filing_date":"2012-03-07T00:00:00.000Z","publication_date":"2017-05-09T00:00:00.000Z","cpc_codes":["G02F","G02F"],"num_claims":21,"abstract":"In an embodiment, a lithographic apparatus is disclosed that includes a modulator configured to expose an exposure area of the substrate to a plurality of beams modulated according to a desired pattern and a projection system configured to project the modulated beams onto the substrate. The modulator includes a deflector to displace the plurality of beams with respect to an exposure area."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Lithographic apparatus, programmable patterning device and lithographic method","description":"In an embodiment, a lithographic apparatus is disclosed that includes a modulator configured to expose an exposure area of the substrate to a plurality of beams modulated according to a desired patter","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9645502","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9645502","citation_suggestion":"Patentable. \"Lithographic apparatus, programmable patterning device and lithographic method\" (US-9645502). https://patentable.app/patents/US-9645502","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9645502","json":"https://patentable.app/api/llm-context/US-9645502","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:09:29.175Z"}