{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9647625","patent":{"patent_number":"US-9647625","title":"Method for manufacturing BAW resonators on a semiconductor wafer","assignee":null,"inventors":[],"filing_date":"2013-11-19T00:00:00.000Z","publication_date":"2017-05-09T00:00:00.000Z","cpc_codes":["G01N","G02F"],"num_claims":15,"abstract":"A method for manufacturing a wafer on which are formed resonators, each resonator including, above a semiconductor substrate, a stack of layers including, in the following order from the substrate surface: a Bragg mirror; a compensation layer made of a material having a temperature coefficient of the acoustic velocity of a sign opposite to that of all the other stack layers; and a piezoelectric resonator, the method including the successive steps of: a) depositing the compensation layer; and b) decreasing thickness inequalities of the compensation layer due to the deposition method, so that this layer has a same thickness to within better than 2%, and preferably to within better than 1%, at the level of each resonator."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for manufacturing BAW resonators on a semiconductor wafer","description":"A method for manufacturing a wafer on which are formed resonators, each resonator including, above a semiconductor substrate, a stack of layers including, in the following order from the substrate sur","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9647625","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9647625","citation_suggestion":"Patentable. \"Method for manufacturing BAW resonators on a semiconductor wafer\" (US-9647625). https://patentable.app/patents/US-9647625","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9647625","json":"https://patentable.app/api/llm-context/US-9647625","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:19:27.304Z"}