{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9652567","patent":{"patent_number":"US-9652567","title":"System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path","assignee":null,"inventors":[],"filing_date":"2014-10-20T00:00:00.000Z","publication_date":"2017-05-16T00:00:00.000Z","cpc_codes":["G06F","G06F"],"num_claims":19,"abstract":"Systems and methods for determining an RF transmission line model for an RF transmission system includes generating a baseline RF transmission line model characterizing the RF transmission system. A plasma RF voltage, RF current, RF power and/or a corresponding RF induced DC bias voltage is calculated from the baseline RF transmission line model. An end module including the electrostatic chuck, a plasma and an RF return path is added to the baseline RF transmission line model to create one or more revised RF transmission line models. A revised plasma RF voltage, a revised plasma RF current, a revised plasma RF power and/or a corresponding revised RF induced DC bias voltage is calculated from each of the revised baseline RF transmission line models. The revised RF transmission line models are scored to identify a best fitting revised RF transmission line model as a complete RF transmission line model."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path","description":"Systems and methods for determining an RF transmission line model for an RF transmission system includes generating a baseline RF transmission line model characterizing the RF transmission system. A p","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9652567","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9652567","citation_suggestion":"Patentable. \"System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path\" (US-9652567). https://patentable.app/patents/US-9652567","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9652567","json":"https://patentable.app/api/llm-context/US-9652567","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:47:44.863Z"}