{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9653298","patent":{"patent_number":"US-9653298","title":"Thermal processing by transmission of mid infra-red laser light through semiconductor substrate","assignee":null,"inventors":[],"filing_date":"2013-01-14T00:00:00.000Z","publication_date":"2017-05-16T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":20,"abstract":"Thermal processing is performed by transmission of mid infra-red laser light through a substrate such as a semiconductor substrate with a limited mid infra-red transmission range. The laser light is generated by a rare-earth-doped fiber laser and is directed through the substrate such that the transmitted power is capable of altering a target material at a back side region of the substrate, for example, on or spaced from the substrate. The substrate may be sufficiently transparent to allow the transmitted mid infra-red laser light to alter the target material without altering the material of the substrate. In one example, the rare-earth-doped fiber laser is a high average power thulium fiber laser operating in a continuous wave (CW) mode and in a 2 μm spectral region."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Thermal processing by transmission of mid infra-red laser light through semiconductor substrate","description":"Thermal processing is performed by transmission of mid infra-red laser light through a substrate such as a semiconductor substrate with a limited mid infra-red transmission range. The laser light is g","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9653298","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9653298","citation_suggestion":"Patentable. \"Thermal processing by transmission of mid infra-red laser light through semiconductor substrate\" (US-9653298). https://patentable.app/patents/US-9653298","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9653298","json":"https://patentable.app/api/llm-context/US-9653298","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T03:55:13.358Z"}