{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9653343","patent":{"patent_number":"US-9653343","title":"Method of manufacturing semiconductor device with shallow trench isolation (STI) having edge profile","assignee":null,"inventors":[],"filing_date":"2016-06-02T00:00:00.000Z","publication_date":"2017-05-16T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":10,"abstract":"A method for fabricating semiconductor device is disclosed. First, a substrate having a first region and a second region is provided, a shallow trench isolation (STI) is formed in the substrate to separate the first region and the second region, and a patterned hard mask is formed on the first region and part of the STI, in which the patterned hard mask exposes includes an opening to expose part of the STI. Next, a gas is driven-in through the exposed STI to alter an edge of the substrate on the first region."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of manufacturing semiconductor device with shallow trench isolation (STI) having edge profile","description":"A method for fabricating semiconductor device is disclosed. First, a substrate having a first region and a second region is provided, a shallow trench isolation (STI) is formed in the substrate to sep","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9653343","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9653343","citation_suggestion":"Patentable. \"Method of manufacturing semiconductor device with shallow trench isolation (STI) having edge profile\" (US-9653343). https://patentable.app/patents/US-9653343","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9653343","json":"https://patentable.app/api/llm-context/US-9653343","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:52:30.170Z"}