{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9653349","patent":{"patent_number":"US-9653349","title":"Semiconductor integrated circuit with nano gap","assignee":null,"inventors":[],"filing_date":"2014-01-24T00:00:00.000Z","publication_date":"2017-05-16T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":19,"abstract":"A method of fabricating a semiconductor integrated circuit (IC) is disclosed. A substrate having a dielectric layer over it is provided. A block co-polymer (BCP) layer is deposited over the dielectric layer. The BCP layer is then annealed to form a first polymer nanostructures surrounded by a second polymer nanostructures over the dielectric layer. The second polymer nanostructure is selectively etched using the first polymer nanostructure as an etch mask to form a nano-block. The dielectric layer is selectively etched using the nano-block as an etch mask to form a nano-trench. The nano-trenched is sealed to form a nano-air-gap."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Semiconductor integrated circuit with nano gap","description":"A method of fabricating a semiconductor integrated circuit (IC) is disclosed. A substrate having a dielectric layer over it is provided. A block co-polymer (BCP) layer is deposited over the dielectric","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9653349","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9653349","citation_suggestion":"Patentable. \"Semiconductor integrated circuit with nano gap\" (US-9653349). https://patentable.app/patents/US-9653349","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9653349","json":"https://patentable.app/api/llm-context/US-9653349","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:17:33.954Z"}