{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9653546","patent":{"patent_number":"US-9653546","title":"Nanowire structure and manufacturing method thereof","assignee":null,"inventors":[],"filing_date":"2015-04-16T00:00:00.000Z","publication_date":"2017-05-16T00:00:00.000Z","cpc_codes":["H01L","B82Y","B82Y"],"num_claims":12,"abstract":"A manufacturing method of a nanowire structure includes the following steps. A fin and a shallow trench isolation (STI) are formed on a substrate. A first patterned insulation layer is formed on an exposed upper part of the fin. The STI is then recessed for exposing a lower part of the fin. A second patterned insulation layer is formed in second regions for covering the first patterned insulation layer and the exposed part of the fin. The lower part of the fin is then removed for forming an upper fin and a lower fin in a first region. The STI is further recessed for exposing a portion of the lower fin and a portion of the fin in the second regions. The first patterned insulation layer on the first region is removed, and the upper fin is converted into a first nanowire."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Nanowire structure and manufacturing method thereof","description":"A manufacturing method of a nanowire structure includes the following steps. A fin and a shallow trench isolation (STI) are formed on a substrate. A first patterned insulation layer is formed on an ex","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9653546","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9653546","citation_suggestion":"Patentable. \"Nanowire structure and manufacturing method thereof\" (US-9653546). https://patentable.app/patents/US-9653546","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9653546","json":"https://patentable.app/api/llm-context/US-9653546","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:01:15.081Z"}