{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9653564","patent":{"patent_number":"US-9653564","title":"Semiconductor device and method of manufacturing the same","assignee":null,"inventors":[],"filing_date":"2016-03-07T00:00:00.000Z","publication_date":"2017-05-16T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":10,"abstract":"There is provided a method of manufacturing a semiconductor device. The method of manufacturing comprises a film formation process of forming a molybdenum layer that is mainly made of molybdenum (Mo), on at least one of a semiconductor layer, an insulating film and an electrode in the semiconductor device; a heat treatment process of heating the molybdenum layer at temperature of not lower than 200° C.; and a dry etching process of processing the semiconductor device that includes the formed molybdenum layer by dry etching, subsequent to the heat treatment process."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Semiconductor device and method of manufacturing the same","description":"There is provided a method of manufacturing a semiconductor device. The method of manufacturing comprises a film formation process of forming a molybdenum layer that is mainly made of molybdenum (Mo),","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9653564","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9653564","citation_suggestion":"Patentable. \"Semiconductor device and method of manufacturing the same\" (US-9653564). https://patentable.app/patents/US-9653564","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9653564","json":"https://patentable.app/api/llm-context/US-9653564","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:46:04.028Z"}