{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9663541","patent":{"patent_number":"US-9663541","title":"Group 5 metal oxo-alkoxo complex, method for producing same, and method for manufacturing group 5 metal oxide film","assignee":null,"inventors":[],"filing_date":"2013-12-27T00:00:00.000Z","publication_date":"2017-05-30T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":17,"abstract":"A compound useful for the manufacture of a Group 5 metal oxide film is provided. The compound is a Group 5 metal oxo-alkoxo complex represented by the following formula (A), and after preparing a film-forming material solution containing the compound and an organic solvent, a Group 5 metal oxide film can be manufactured using the film-forming material solution:Mα(μ4-O)β(μ3-O)γ(μ-O)δ(μ-ORA)∈(ORA)ζ(RAOH)ηXθYι  (A)(wherein M represents a niobium atom, etc.; RA represents an alkyl group; X represents an alkylenedioxy group; Y represents a carboxy group, etc.; α represents an integer of 3 to 10; β represents 0 or 1; γ represents an integer of 0 to 8; δ represents an integer of 2 to 9; ∈ represents an integer of 0 to 6; ζ represents an integer of 6 to 16; η represents an integer of 0 to 4; θ represents an integer of 0 to 2; and ι represents an integer of 0 to 6)."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Group 5 metal oxo-alkoxo complex, method for producing same, and method for manufacturing group 5 metal oxide film","description":"A compound useful for the manufacture of a Group 5 metal oxide film is provided. The compound is a Group 5 metal oxo-alkoxo complex represented by the following formula (A), and after preparing a film","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9663541","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9663541","citation_suggestion":"Patentable. \"Group 5 metal oxo-alkoxo complex, method for producing same, and method for manufacturing group 5 metal oxide film\" (US-9663541). https://patentable.app/patents/US-9663541","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9663541","json":"https://patentable.app/api/llm-context/US-9663541","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:22:04.800Z"}