{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9664509","patent":{"patent_number":"US-9664509","title":"Signal sectioning for profiling printed-circuit-bord vias with vertical scanning interferometry","assignee":null,"inventors":[],"filing_date":"2014-12-19T00:00:00.000Z","publication_date":"2017-05-30T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":6,"abstract":"The rough bottom surface of a recessed feature partially obscured by an overlying structure is profiled interferometrically with acceptable precision using an objective with sufficiently large numerical aperture to illuminate the bottom under the obscuring structure. The light scattering produced by the roughness of the surface causes diffused light to return to the objective and yield reliable data fringes. Under such appropriate numerical-aperture and surface roughness conditions, the bottom surface of such recessed features can be profiled correctly simply by segmenting the correlograms produced by the scan and processing all fringes that correspond to the bottom surface elevation."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Signal sectioning for profiling printed-circuit-bord vias with vertical scanning interferometry","description":"The rough bottom surface of a recessed feature partially obscured by an overlying structure is profiled interferometrically with acceptable precision using an objective with sufficiently large numeric","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9664509","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9664509","citation_suggestion":"Patentable. \"Signal sectioning for profiling printed-circuit-bord vias with vertical scanning interferometry\" (US-9664509). https://patentable.app/patents/US-9664509","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9664509","json":"https://patentable.app/api/llm-context/US-9664509","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:23:10.180Z"}