{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9664704","patent":{"patent_number":"US-9664704","title":"Drive and compensation circuit for capacitive MEMs structures","assignee":null,"inventors":[],"filing_date":"2015-06-04T00:00:00.000Z","publication_date":"2017-05-30T00:00:00.000Z","cpc_codes":["G01C"],"num_claims":11,"abstract":"A circuit for activating a capacitive MEMS structure is provided, with the capacitive MEMS structure having an oscillator element and an electrostatic excitation unit with a first input connection and a second input connection. The circuit includes a high voltage generator, a first pump capacitor, a second pump capacitor, a control unit, and a low voltage operation amplifier. The high voltage generator generates a high voltage and connects to the first input connection and the second input connection. The first pump capacitor is connected to the high voltage generator and includes a first connection connected to the first input connection. The second pump capacitor connects to the high voltage generator and includes a first connection connected to the second input connection. The control unit connects to a second connection of the first pump capacitor and a second connection of the second pump capacitor. The low voltage operation amplifier connects to the control unit."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Drive and compensation circuit for capacitive MEMs structures","description":"A circuit for activating a capacitive MEMS structure is provided, with the capacitive MEMS structure having an oscillator element and an electrostatic excitation unit with a first input connection and","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9664704","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9664704","citation_suggestion":"Patentable. \"Drive and compensation circuit for capacitive MEMs structures\" (US-9664704). https://patentable.app/patents/US-9664704","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9664704","json":"https://patentable.app/api/llm-context/US-9664704","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:01:54.794Z"}