{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9665108","patent":{"patent_number":"US-9665108","title":"Vibration reduction apparatus, lithography apparatus, and method of manufacturing article","assignee":null,"inventors":[],"filing_date":"2015-03-13T00:00:00.000Z","publication_date":"2017-05-30T00:00:00.000Z","cpc_codes":["G05D","G05B"],"num_claims":19,"abstract":"The present invention provides a vibration reduction apparatus which reduces a vibration of a target object supported on a base, comprising a first object supported by a first elastic member on the base, a second object supported by a second elastic member on the first object, a detection unit including a sensor having a first electrode provided on the first object and a second electrode provided on the second object, and a processor configured to obtain a distance between the first electrode and the second electrode using the sensor, a first driving unit configured to drive the first object, a first control unit configured to control the distance between the first electrode and the second electrode constant based on a detection result, wherein the second electrode and the processor are electrically connected to each other via the second elastic member."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Vibration reduction apparatus, lithography apparatus, and method of manufacturing article","description":"The present invention provides a vibration reduction apparatus which reduces a vibration of a target object supported on a base, comprising a first object supported by a first elastic member on the ba","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9665108","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9665108","citation_suggestion":"Patentable. \"Vibration reduction apparatus, lithography apparatus, and method of manufacturing article\" (US-9665108). https://patentable.app/patents/US-9665108","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9665108","json":"https://patentable.app/api/llm-context/US-9665108","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:36:25.745Z"}