{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9666469","patent":{"patent_number":"US-9666469","title":"Lifting device, substrate processing apparatus having lifting device, and unit transferring method","assignee":null,"inventors":[],"filing_date":"2014-09-23T00:00:00.000Z","publication_date":"2017-05-30T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":12,"abstract":"A lifting device 630b includes a lifting mechanism 640 and an adjustment member 660. The lifting mechanism 640 is provided between at least one of a plurality of units of a substrate processing apparatus and an installation surface of the unit, and adjusts height of the at least one unit with respect to the installation surface. The adjustment member 660 is provided with an extended section 664 extended from the lifting mechanism 640, and is capable of operating the lifting mechanism 640 through the extended section 664. "},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Lifting device, substrate processing apparatus having lifting device, and unit transferring method","description":"A lifting device 630b includes a lifting mechanism 640 and an adjustment member 660. The lifting mechanism 640 is provided between at least one of a plurality of units of a substrate processing appara","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9666469","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9666469","citation_suggestion":"Patentable. \"Lifting device, substrate processing apparatus having lifting device, and unit transferring method\" (US-9666469). https://patentable.app/patents/US-9666469","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9666469","json":"https://patentable.app/api/llm-context/US-9666469","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:41:45.464Z"}