{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9666491","patent":{"patent_number":"US-9666491","title":"Method of forming semiconductor device","assignee":null,"inventors":[],"filing_date":"2016-06-16T00:00:00.000Z","publication_date":"2017-05-30T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":9,"abstract":"A method of forming a semiconductor device includes following steps. Firstly, a first transistor is formed on a first surface of a substrate. Next, a thinning process is performed on the second surface of the substrate which is opposite to the first surface, to form a third surface. Then, a second transistor is formed on the third surface, in which the second transistor and the first transistor are electrically connected to each other through a through-silicon via penetrating through the first surface and the third surface."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of forming semiconductor device","description":"A method of forming a semiconductor device includes following steps. Firstly, a first transistor is formed on a first surface of a substrate. Next, a thinning process is performed on the second surfac","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9666491","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9666491","citation_suggestion":"Patentable. \"Method of forming semiconductor device\" (US-9666491). https://patentable.app/patents/US-9666491","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9666491","json":"https://patentable.app/api/llm-context/US-9666491","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:21:59.920Z"}