{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9666533","patent":{"patent_number":"US-9666533","title":"Airgap formation between source/drain contacts and gates","assignee":null,"inventors":[],"filing_date":"2016-06-30T00:00:00.000Z","publication_date":"2017-05-30T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"After forming a source/drain contact including a source/drain contact liner and a source/drain contact conductor surrounded by the source/drain contact liner to contact one of source/drain regions formed on opposite sides of a functional gate structure, vertical portions of the source/drain contact liner are recessed partially or completely to provide a cavity between the functional gate structure and the source/drain contact conductor. An etch resistant layer is deposited over the functional gate structure, each source/drain contact and each cavity to pinch off each cavity, thus forming an airgap between the functional gate structure and each source/drain contact."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Airgap formation between source/drain contacts and gates","description":"After forming a source/drain contact including a source/drain contact liner and a source/drain contact conductor surrounded by the source/drain contact liner to contact one of source/drain regions for","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9666533","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9666533","citation_suggestion":"Patentable. \"Airgap formation between source/drain contacts and gates\" (US-9666533). https://patentable.app/patents/US-9666533","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9666533","json":"https://patentable.app/api/llm-context/US-9666533","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:23:42.879Z"}