{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9666537","patent":{"patent_number":"US-9666537","title":"Methods and apparatus using front-to-back alignment mark and placement for narrow wafer scribe lines","assignee":null,"inventors":[],"filing_date":"2015-04-28T00:00:00.000Z","publication_date":"2017-05-30T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":8,"abstract":"Methods and apparatus for front-to-back alignment using narrow scribe lines are disclosed. An apparatus is disclosed that includes a semiconductor wafer comprising a plurality of areas for the fabrication of integrated circuit devices on a device side, the integrated circuit devices arranged in rows and columns and spaced from one another by a plurality of scribe lines disposed on the semiconductor wafer in areas between the integrated circuit devices and free from integrated circuit devices; and one or more alignment marks disposed on the semiconductor wafer, the alignment marks positioned in an intersection of two of the scribe lines; wherein the scribe lines have a first minimum dimension and the one or more alignment marks have a second minimum dimension that is greater than the first minimum dimension. Methods and additional apparatus are disclosed."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Methods and apparatus using front-to-back alignment mark and placement for narrow wafer scribe lines","description":"Methods and apparatus for front-to-back alignment using narrow scribe lines are disclosed. An apparatus is disclosed that includes a semiconductor wafer comprising a plurality of areas for the fabrica","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9666537","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9666537","citation_suggestion":"Patentable. \"Methods and apparatus using front-to-back alignment mark and placement for narrow wafer scribe lines\" (US-9666537). https://patentable.app/patents/US-9666537","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9666537","json":"https://patentable.app/api/llm-context/US-9666537","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T04:15:07.410Z"}