{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9666687","patent":{"patent_number":"US-9666687","title":"Method for forming semiconductor structure","assignee":null,"inventors":[],"filing_date":"2016-06-21T00:00:00.000Z","publication_date":"2017-05-30T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":18,"abstract":"The present invention provides a method for forming a semiconductor structure, at least including the following steps: first, four sacrificial patterns are formed on a substrate, and a plurality of spacers are then formed surrounding each sacrificial pattern. Next, the four sacrificial patterns are removed, and a photoresist layer is formed between each spacer, covering parts of each spacer. Afterwards, a first etching process is performed to partially remove each spacer, and the photoresist layer is then removed, and a second etching process is then performed, to remove each spacer again, and to form four nanowire hard masks."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for forming semiconductor structure","description":"The present invention provides a method for forming a semiconductor structure, at least including the following steps: first, four sacrificial patterns are formed on a substrate, and a plurality of sp","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9666687","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9666687","citation_suggestion":"Patentable. \"Method for forming semiconductor structure\" (US-9666687). https://patentable.app/patents/US-9666687","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9666687","json":"https://patentable.app/api/llm-context/US-9666687","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:44:36.674Z"}