{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9668063","patent":{"patent_number":"US-9668063","title":"Capacitance type sensor, acoustic sensor, and microphone","assignee":null,"inventors":[],"filing_date":"2013-09-09T00:00:00.000Z","publication_date":"2017-05-30T00:00:00.000Z","cpc_codes":["H04R","H04R","H04R","H04R","H04R","H04R","H04R","H04R","H04R","H04R","H04R"],"num_claims":13,"abstract":"A chamber that penetrates vertically is formed in a silicon substrate. A diaphragm is arranged on the upper surface of the silicon substrate so as to cover the upper opening of the chamber. The diaphragm is divided by slits into a region located above the chamber (first diaphragm) and a region located above the upper surface of the silicon substrate (second diaphragm). A fixed electrode plate is arranged above the first diaphragm, and a low-volume first acoustic sensing portion is formed by the first diaphragm and the fixed electrode plate. Also, a high-volume second acoustic sensing portion is formed by the second diaphragm and the upper surface (electrically conducting layer) of the silicon substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Capacitance type sensor, acoustic sensor, and microphone","description":"A chamber that penetrates vertically is formed in a silicon substrate. A diaphragm is arranged on the upper surface of the silicon substrate so as to cover the upper opening of the chamber. The diaphr","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9668063","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9668063","citation_suggestion":"Patentable. \"Capacitance type sensor, acoustic sensor, and microphone\" (US-9668063). https://patentable.app/patents/US-9668063","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9668063","json":"https://patentable.app/api/llm-context/US-9668063","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:21:56.927Z"}