{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9671323","patent":{"patent_number":"US-9671323","title":"Detection of foreign material on a substrate chuck","assignee":null,"inventors":[],"filing_date":"2015-05-06T00:00:00.000Z","publication_date":"2017-06-06T00:00:00.000Z","cpc_codes":["G01N","G01N","H01L"],"num_claims":20,"abstract":"A method and apparatus for determining the presence of foreign material on a substrate chuck. The method includes: placing a bottom surface of a substrate on a top surface of the substrate chuck; applying a lateral force in a direction parallel to a top surface of the substrate chuck to the substrate; when the substrate moves partially off or moves completely off the substrate chuck in response to the applying the lateral force then a defect is present between the top surface of the substrate chuck and the bottom surface of the substrate; or when the substrate remains completely on the substrate chuck in response to the applying the lateral force then a defect is not present between the top surface of the substrate chuck and the bottom surface of the substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Detection of foreign material on a substrate chuck","description":"A method and apparatus for determining the presence of foreign material on a substrate chuck. The method includes: placing a bottom surface of a substrate on a top surface of the substrate chuck; appl","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9671323","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9671323","citation_suggestion":"Patentable. \"Detection of foreign material on a substrate chuck\" (US-9671323). https://patentable.app/patents/US-9671323","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9671323","json":"https://patentable.app/api/llm-context/US-9671323","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:44:04.677Z"}