{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9673113","patent":{"patent_number":"US-9673113","title":"Method and system for real-time polishing recipe control","assignee":null,"inventors":[],"filing_date":"2014-07-09T00:00:00.000Z","publication_date":"2017-06-06T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":14,"abstract":"Systems and methods are provided for controlling a polishing process in real-time. First and second characteristics are identified in first and second data sets, respectively, with each data set corresponding to a real-time wafer polishing data. A time delta is computed between the times at which the first and second characteristics occur within their respective data sets, and polishing parameters are then updated in real-time based on the computed time delta."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and system for real-time polishing recipe control","description":"Systems and methods are provided for controlling a polishing process in real-time. First and second characteristics are identified in first and second data sets, respectively, with each data set corre","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9673113","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9673113","citation_suggestion":"Patentable. \"Method and system for real-time polishing recipe control\" (US-9673113). https://patentable.app/patents/US-9673113","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9673113","json":"https://patentable.app/api/llm-context/US-9673113","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:46:34.399Z"}