{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9677811","patent":{"patent_number":"US-9677811","title":"Substrate cleaning and drying apparatus","assignee":null,"inventors":[],"filing_date":"2014-07-31T00:00:00.000Z","publication_date":"2017-06-13T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":5,"abstract":"An apparatus for cleaning and drying a substrate is disclosed. The apparatus includes a substrate holder configured to hold a substrate, a rotating device configured to rotate the substrate holder, a cylindrical cup surrounding a peripheral portion of the substrate, and a gas ejector disposed below the substrate. The gas ejector has at least one gas discharge opening arranged along an entire circumference of the substrate. The gas ejector is configured to discharge a gas downwardly from the gas discharge opening to induce downward flow of air in a gap between a peripheral portion of the substrate and the cylindrical cup."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate cleaning and drying apparatus","description":"An apparatus for cleaning and drying a substrate is disclosed. The apparatus includes a substrate holder configured to hold a substrate, a rotating device configured to rotate the substrate holder, a ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9677811","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9677811","citation_suggestion":"Patentable. \"Substrate cleaning and drying apparatus\" (US-9677811). https://patentable.app/patents/US-9677811","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9677811","json":"https://patentable.app/api/llm-context/US-9677811","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T04:31:13.673Z"}